Proof of Concept: Glass-Membrane Based Differential Pressure Sensor

verfasst von

Anatoly Glukhovskoy, Maren Susanne Prediger, Jennifer Schäfer, Antonio Ambrosio, Norbert Ambrosius, Aaron Vogt, Rafael Santos, Roman Ostholt, Marc Wurz

Abstract

As an alternative to silicon membranes, a pressure sensor concept based on glass-membranes was developed, monolithically manufactured, and evaluated. Pt strain gauge structures of two geometries were fabricated on circular and square glass membranes, realized using the Laser Induced Deep Etching (LIDE) technology. The basal resistivity, the offset voltage, and pressure and temperature dependencies were measured. The designs exhibited linear behavior in the tested regimes and high sensitivity. A discussion of the results and classification regarding the use of glass as a substrate draws the conclusion that the LIDE technology is well suited to manufacture mechanically loaded, monolithic glass-based MEMS without process-related substrate damage.

Organisationseinheit(en)

PhoenixD: Simulation, Fabrikation und Anwendung optischer Systeme
Institut für Mikroproduktionstechnik

Externe Organisation(en)

LPKF Laser & Electronics AG

Typ

Aufsatz in Konferenzband

Seiten

1563-1570

Anzahl der Seiten

8

Publikationsdatum

2021

Publikationsstatus

Veröffentlicht

Peer-reviewed

Ja

ASJC Scopus Sachgebiete

Elektronische, optische und magnetische Materialien, Elektrotechnik und Elektronik

Elektronische Version(en)

https://doi.org/10.1109/ectc32696.2021.00248 (Zugang: Geschlossen)