Prof. Dr.-Ing. Marc Wurz

Microproduction technology makes it possible to manufacture optical systems across scales from the nanometre to the millimetre range. It is regarded as an enabling technology in this pioneering field. The IMPT has therefore set itself the task of researching and mastering technologies for optical applications in order to make them accessible to the Cluster of Excellence. The technology spectrum includes the steps required for this: lithography, coating and etching technology. This enables the IMPT to realise the designs of the partners in the Cluster of Excellence in real components. In a first approach, an integration platform was developed, which forms the basis for the step towards photonically integrated chips.

The current focus of the work in PhoenixD is the development of a reproducible diamond technology for the members of the Cluster of Excellence. This includes the deposition of monocrystalline and polycrystalline diamonds at wafer level combined with the necessary mechanical processing and lithographic structuring. On this basis, a wide range of optical applications in the field of diamond-based waveguides and lenses can be realised. In addition, the newly installed structuring capability for glass allows the IMPT to transfer the existing optical platform to this substrate. In future, electron beam lithography will be available at the IMPT, which will allow the necessary resolution to produce optical components with high precision.