Low-cost fabrication of polymer based micro-optical devices for application in illumination, sensing, and optical interconnects

authored by
Muhammad Shaukat Khan, Maik Rahlves, Roland Lachmayer, Bernhard Roth
Abstract

Fabrication of desired micro structures in polymers is always of keen interest for applications in illumination optics, sensors and optical interconnects. The challenge is to fabricate structures in the sub-micron range but at low cost. Among other fabrication methods as described in [1], maskless lithography tends to be cost effective and can create sub-micron structures.

Organisation(s)
Hannover Centre for Optical Technologies (HOT)
Institute of Motion Engineering and Mechanism Design
PhoenixD: Photonics, Optics, and Engineering - Innovation Across Disciplines
Type
Conference abstract
Publication date
2019
Publication status
Published
Peer reviewed
Yes
ASJC Scopus subject areas
Electronic, Optical and Magnetic Materials, Mechanics of Materials
Electronic version(s)
https://opg.optica.org/abstract.cfm?uri=cleo_europe-2019-ce_10_6 (Access: Closed)