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Study of rotary atomic layer deposition for optical applications

authored by
Leif Kochanneck, Andreas Tewes, Gerd Albert Hoffmann, Kalle Niiranen, John Rönn, Hector Velasco, Sami Sneck, Andreas Wienke, Detlev Ristau
Organisation(s)
PhoenixD: Photonics, Optics, and Engineering - Innovation Across Disciplines
Institute of Quantum Optics
External Organisation(s)
Laser Zentrum Hannover e.V. (LZH)
Beneq Oy
Type
Conference contribution
Publication date
05.03.2022
Publication status
Published
Peer reviewed
Yes
ASJC Scopus subject areas
Electronic, Optical and Magnetic Materials, Condensed Matter Physics, Computer Science Applications, Applied Mathematics, Electrical and Electronic Engineering
Electronic version(s)
https://doi.org/10.1117/12.2612173 (Access: Closed)