Magnetron sputter deposition of Ta₂O₅-SiO₂ quantized nanolaminates

authored by

S. Schwyn Thöny, M. Bärtschi, M. Batzer, M. Baselgia, S. Waldner, M. Steinecke, H. Badorreck, A. Wienke, M. Jupé

Abstract

Quantized nanolaminates are a type of optical metamaterials, which were discovered only recently. Their feasibility was demonstrated by atomic layer deposition and ion beam sputtering so far. In this paper, we will report on the successful magnetron sputter deposition of quantized nanolaminates based on Ta₂O₅-SiO₂. We will describe the deposition process, show results and material characterization of films deposited in a very wide parameter range. Furthermore, we will show how quantized nanolaminates deposited by magnetron sputtering were used in optical interference coatings such as antireflection and mirror coatings.

Organisation(s)

PhoenixD: Photonics, Optics, and Engineering - Innovation Across Disciplines

External Organisation(s)

Evatec AG
RhySearch
Laser Zentrum Hannover e.V. (LZH)

Type

Article

Journal

Optics express

Volume

31

Pages

15825-15835

No. of pages

11

ISSN

1094-4087

Publication date

26.04.2023

Publication status

Published

Peer reviewed

Yes

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics

Electronic version(s)

https://doi.org/10.1364/OE.487892 (Access: Open)