Novel Concept for Micro-Assembly of Optical Devices Using a Planar Motor System
Abstract
Research and Development in recent years has led to first commercially available, magnetically levitated planar motor systems. Considering the advantages of such systems, they perfectly fit as a substitute for multi-axis fine positioning stages in high-volume productions. To address the need for solutions for high-volume packaging of optical devices, we present a novel concept for a micro-assembly station using a planar motor. To qualify a novel, vacuum-operatable planar motor system for our design, we conducted experiments regarding positioning repeatability, positioning noise, and dynamics on a pre-series system.
Details
- Organisationseinheit(en)
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Institut für Montagetechnik und Industrierobotik
PhoenixD: Simulation, Fabrikation und Anwendung optischer Systeme
- Typ
- Aufsatz in Konferenzband
- Anzahl der Seiten
- 10
- Publikationsdatum
- 2024
- Publikationsstatus
- Veröffentlicht
- Peer-reviewed
- Ja
- Elektronische Version(en)
-
https://doi.org/10.15488/16411 (Zugang:
Offen
)
