Novel Concept for Micro-Assembly of Optical Devices Using a Planar Motor System

Verfasst von

Niklas Terei, Lars Binnemann, Annika Raatz

Abstract

Research and Development in recent years has led to first commercially available, magnetically levitated planar motor systems. Considering the advantages of such systems, they perfectly fit as a substitute for multi-axis fine positioning stages in high-volume productions. To address the need for solutions for high-volume packaging of optical devices, we present a novel concept for a micro-assembly station using a planar motor. To qualify a novel, vacuum-operatable planar motor system for our design, we conducted experiments regarding positioning repeatability, positioning noise, and dynamics on a pre-series system.

Organisationseinheit(en)

Institut für Montagetechnik und Industrierobotik
PhoenixD: Simulation, Fabrikation und Anwendung optischer Systeme

Typ

Aufsatz in Konferenzband

Anzahl der Seiten

10

Publikationsdatum

2024

Publikationsstatus

Veröffentlicht

Peer-reviewed

Ja

Elektronische Version(en)

https://doi.org/10.15488/16411 (Zugang: Offen )