Proof of Concept: Glass-Membrane Based Differential Pressure Sensor
- authored by
- Anatoly Glukhovskoy, Maren Susanne Prediger, Jennifer Schäfer, Antonio Ambrosio, Norbert Ambrosius, Aaron Vogt, Rafael Santos, Roman Ostholt, Marc Wurz
- Abstract
As an alternative to silicon membranes, a pressure sensor concept based on glass-membranes was developed, monolithically manufactured, and evaluated. Pt strain gauge structures of two geometries were fabricated on circular and square glass membranes, realized using the Laser Induced Deep Etching (LIDE) technology. The basal resistivity, the offset voltage, and pressure and temperature dependencies were measured. The designs exhibited linear behavior in the tested regimes and high sensitivity. A discussion of the results and classification regarding the use of glass as a substrate draws the conclusion that the LIDE technology is well suited to manufacture mechanically loaded, monolithic glass-based MEMS without process-related substrate damage.
- Organisation(s)
-
PhoenixD: Photonics, Optics, and Engineering - Innovation Across Disciplines
Institute of Microtechnology
- External Organisation(s)
-
LPKF Laser & Electronics AG
- Type
- Conference contribution
- Pages
- 1563-1570
- No. of pages
- 8
- Publication date
- 2021
- Publication status
- Published
- Peer reviewed
- Yes
- ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials, Electrical and Electronic Engineering
- Electronic version(s)
-
https://doi.org/10.1109/ectc32696.2021.00248 (Access:
Closed)