Miniaturized electro-optical modulator based on substrate-free thin films
- authored by
- Anna K. Rüsseler, Michael McKinlay, Jonas N. Matthes, Carlos Garcia Nuñez, Philipp Gehrke, Marco Jupé, Gerd A. Hoffmann, Andreas Wienke, Detlev Ristau
- Abstract
We report on an integrable electro-optic modulator (EOM), exploiting the advantages of substrate-free thin film technology to achieve a small device footprint of less than 30 µm along the beam propagation direction. By integrating an electro-optically active layer into a resonant Fabry-Perot (FP) structure with dielectric thin film mirrors, an EOM, which modulates the transmitted amplitude, is manufactured and characterized. We show results on electro-optically active polymers as the FP cavity material, which have revealed an electro-optic coefficient in the three-digit pm/V range at a wavelength of 980 nm. Furthermore, we analyze the applicability of piezoelectric zinc oxide (ZnO) as the active layer material, which exhibits high transmission in the visible wavelength region. Fabrication of ZnO using magnetron sputtering under oblique angle deposition conditions has the potential to produce porous, inclined, crystalline thin films with an enhanced piezoelectric coefficient d33, which is otherwise only found in bulk ceramics like lead zirconate titanate. The use of such nanostructured ZnO thin films with an improved electro-mechanical coupling as active cavity layer fosters improved modulation while consuming less energy.
- Organisation(s)
-
PhoenixD: Simulation, Fabrikation und Anwendung optischer Systeme
Institut für Quantenoptik
- External Organisation(s)
-
Laser Zentrum Hannover e.V. (LZH)
University of Glasgow
- Type
- Aufsatz in Konferenzband
- No. of pages
- 4
- Publication date
- 19.03.2025
- Publication status
- Veröffentlicht
- Peer reviewed
- Yes
- ASJC Scopus Sachgebiete
- Elektronische, optische und magnetische Materialien, Physik der kondensierten Materie, Angewandte Informatik, Angewandte Mathematik, Elektrotechnik und Elektronik
- Electronic version(s)
-
https://doi.org/10.1117/12.3040506 (Access:
Geschlossen)
