Novel Concept for Micro-Assembly of Optical Devices Using a Planar Motor System

Authored by

Niklas Terei, Lars Binnemann, Annika Raatz

Abstract

Research and Development in recent years has led to first commercially available, magnetically levitated planar motor systems. Considering the advantages of such systems, they perfectly fit as a substitute for multi-axis fine positioning stages in high-volume productions. To address the need for solutions for high-volume packaging of optical devices, we present a novel concept for a micro-assembly station using a planar motor. To qualify a novel, vacuum-operatable planar motor system for our design, we conducted experiments regarding positioning repeatability, positioning noise, and dynamics on a pre-series system.

Details

Organisation(s)
Institute for Assembly Technology and Robotics
PhoenixD: Photonics, Optics, and Engineering - Innovation Across Disciplines
Type
Conference contribution
No. of pages
10
Publication date
2024
Publication status
Published
Peer reviewed
Yes
Electronic version(s)
https://doi.org/10.15488/16411 (Access: Open )