Holographic Microscopy as In-Line Metrology Tool

authored by

Hannes Robben, Reinhard Caspary, Lei Zheng, Dominik Woiwode, Konrad Bethmann, Bernhard Roth

Abstract

Structural fidelity in nano- and micro photonic device fabrication is critical, as minor deviations can significantly alter device functionality. Current quality control for two-photon polymerization (2PP) additive manufacturing relies on external verification techniques like scanning electron microscopy, requiring labor-intensive preparation that may compromise samples. We present a novel in-situ approach integrating digital holographic microscopy (DHM) directly within the 2PP setup, enabling real-time monitoring without interruption or sample preparation. Our implementation provides continuous observation throughout the manufacturing process, allowing unprecedented process oversight. Results show that DHM effectively tracks phase changes during polymerization, revealing structural development previously unobservable during production. This methodology offers potential for live process optimization and error correction, representing a significant step toward closed-loop manufacturing for high-precision photonic devices.

Organisation(s)

PhoenixD: Simulation, Fabrikation und Anwendung optischer Systeme
Hannoversches Zentrum für Optische Technologien (HOT)
Institut für Informationsverarbeitung

Type

Aufsatz in Konferenzband

Publication date

2025

Publication status

Veröffentlicht

Peer reviewed

Yes

ASJC Scopus Sachgebiete

Elektronische, optische und magnetische Materialien, Computernetzwerke und -kommunikation, Elektrotechnik und Elektronik

Electronic version(s)

https://doi.org/10.1109/ICTON67126.2025.11125042 (Access: Geschlossen)