Calibration of an in-line digital holographic microscope

authored by

Hannes Robben, Reinhard Caspary, Konrad Bethmann, Bernhard Roth

Abstract

We present a calibration method that correlates in-line measurement results from a digital holographic microscope (DHM) integrated into a two-photon polymerisation system (TPP) with offline results from a high-resolution laser scanning microscope (LSM). Our findings indicate that a single calibration step for a specific polymer is sufficient to reliably monitor the fabrication of various structures. In future, this approach will make it possible to adapt the production process to the manufactured structure geometry in real time.

Organisation(s)

PhoenixD: Simulation, Fabrikation und Anwendung optischer Systeme
Institut für Informationsverarbeitung

Type

Aufsatz in Konferenzband

Publication date

22.09.2025

Publication status

Veröffentlicht

Peer reviewed

Yes

ASJC Scopus Sachgebiete

Allgemeine Physik und Astronomie

Electronic version(s)

https://doi.org/10.1051/epjconf/202533501003 (Access: Offen)