Surface structuring of glass with submicrometer features using selective laser etching

authored by

Axel Günther, Xiaowei Wang, Wolfgang Kowalsky, Bernhard Roth

Abstract

Selective laser etching (SLE) is a procedure to create customized micro-fluidic or micro-mechanical structures in glass. We aim to utilize SLE for optics production as well and report on detailed investigations of the glass structuring process by variation of stage speed, laser power, polarization and repetition rate of the laser to reduce the surface roughness to optical quality without any additional process steps. We show that a surface roughness of 30 nm can be achieved which is sufficient to fabricate optical components or integrated optical structures even for the visible wavelength range. Our results enable the fabrication of free standing micro-structures with a feature size of less than 1 µm in fused silica using SLE and KOH as etchant which enables the fabrication of optical gratings.

Organisation(s)

PhoenixD: Simulation, Fabrikation und Anwendung optischer Systeme
Hannoversches Zentrum für Optische Technologien (HOT)

External Organisation(s)

Technische Universität Braunschweig

Type

Artikel

Journal

Scientific reports

Volume

15

ISSN

2045-2322

Publication date

10.11.2025

Publication status

Veröffentlicht

Peer reviewed

Yes

ASJC Scopus Sachgebiete

Allgemein

Electronic version(s)

https://doi.org/10.1038/s41598-025-27241-0 (Access: Offen)