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Preferential sputtering of metal oxide mixture thin films

authored by
Mathias Mende, Florian Carstens, Henrik Ehlers, Detlev Ristau
Organisation(s)
PhoenixD: Photonics, Optics, and Engineering - Innovation Across Disciplines
External Organisation(s)
Laser Zentrum Hannover e.V. (LZH)
Type
Article
Journal
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume
39
ISSN
0734-2101
Publication date
01.03.2021
Publication status
Published
Peer reviewed
Yes
ASJC Scopus subject areas
Condensed Matter Physics, Surfaces and Interfaces, Surfaces, Coatings and Films
Electronic version(s)
https://doi.org/10.1116/6.0000799 (Access: Closed)